Nissan Tanaka
NISSAN TANAKA TORR-150 Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: TORR-150
Low-pressure, standard model for the primary side low-pressure use: TORR-150
Features
- Due to its long track record, the TORR series has earned high trust and is often referred to as the “synonym for semiconductor gas pressure regulators.”
- Technicians perform assembly on all units at 0.3μm in a class 1000 cleanroom.
- We carry out helium leak tests and inspect all items before shipment.
- We also can produce items with electrolytic polishing (with the surface roughness of gas contact metal parts at Ra0.25μm).
- You can use the TORR-150 series as primary low-pressure, high-flow models for reducing primary pressure of liquefied gases or as regulators in piping that requires a flow.
Basic Specifications
Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L
Pressure Gauge: SUS316L
Joint or fitting: SUS316 (Threaded connection), SUS316L (Welding connection)
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604
Pressure regulating handle: ABS plastic, C3604
Performance
Inlet side maximum working pressure: 2.0MPa
Outlet side maximum working pressure: 0.6MPa
Maximum flow rate: 2,400L/min(nor)(P1=1.5MPa, P2=0.6MPa, N₂ GAS)
Operating temperature: -5~40℃
Weight: 3.7kg
Built-in filter filtration degree: The filter is not included, please install it separately
Diameter of inlet and outlet ports: 1/2″
External leak amount: 1.3×10-8Pa・m3/sec below
Flow Characteristics Diagram

Appearance


Description

Designated Attention
※1 If a 4-port specification is selected, please choose the symbol for the primary side pressure gauge from below and replace it with the number 30 in the product name assembly.
| Primary side pressure gauge symbol | Maximum operating pressure |
|---|---|
| 03 | -0.1~0.3MPa(0.2MPa) |
| 06 | -0.1~0.6MPa(0.4MPa) |
| 10 | -0.1~1.0MPa(0.6MPa) |
| 15 | -0.1~1.5MPa(1.0MPa) |
| 30 | -0.1~3.0MPa(2.0MPa) |
※2 If there is no secondary pressure gauge, the symbols for each operating pressure are as follows:
| Operating Pressure | Symbol |
|---|---|
| ~0.2MPa | 03 |
| ~0.4MPa | 06 |
| ~0.6MPa | 10 |
※3 In the case of other shapes, different symbols are used.
※4 When using slant connectors, the structure is basically a welded connection for structure ②. For other types of connectors, structure ② is essentially a threaded connection.
※5 Only joint types S (SwageLock) and F (FineLock) are available for selection.

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.
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