NISSAN TANAKA TORR-150 Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: TORR-150

Low-pressure, standard model for the primary side low-pressure use: TORR-150

Features

Due to its long track record, the TORR series has earned high trust and is often referred to as the “synonym for semiconductor gas pressure regulators.”
Technicians perform assembly on all units at 0.3μm in a class 1000 cleanroom.
We carry out helium leak tests and inspect all items before shipment.
We also can produce items with electrolytic polishing (with the surface roughness of gas contact metal parts at Ra0.25μm).
You can use the TORR-150 series as primary low-pressure, high-flow models for reducing primary pressure of liquefied gases or as regulators in piping that requires a flow.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L
Pressure Gauge: SUS316L
Joint or fitting: SUS316 (Threaded connection), SUS316L (Welding connection)
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604
Pressure regulating handle: ABS plastic, C3604

Performance
Inlet side maximum working pressure: 2.0MPa
Outlet side maximum working pressure: 0.6MPa
Maximum flow rate: 2,400L/min(nor)（P1=1.5MPa, P2=0.6MPa, N₂ GAS）
Operating temperature: -5～40℃
Weight: 3.7kg
Built-in filter filtration degree: The filter is not included, please install it separately
Diameter of inlet and outlet ports: 1/2″
External leak amount: 1.3×10^-8Pa・m3/sec below

Flow Characteristics Diagram

Appearance

Description

Designated Attention

※1 If a 4-port specification is selected, please choose the symbol for the primary side pressure gauge from below and replace it with the number 30 in the product name assembly.

Primary side pressure gauge symbol	Maximum operating pressure
03	-0.1～0.3MPa（0.2MPa)
06	-0.1～0.6MPa（0.4MPa)
10	-0.1～1.0MPa（0.6MPa)
15	-0.1～1.5MPa（1.0MPa)
30	-0.1～3.0MPa（2.0MPa)

※2 If there is no secondary pressure gauge, the symbols for each operating pressure are as follows:

Operating Pressure	Symbol
～0.2MPa	03
～0.4MPa	06
～0.6MPa	10

※3 In the case of other shapes, different symbols are used.
※4 When using slant connectors, the structure is basically a welded connection for structure ②. For other types of connectors, structure ② is essentially a threaded connection.
※5 Only joint types S (SwageLock) and F (FineLock) are available for selection.