NISSAN TANAKA TORR-2300 Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: TORR-2300

High-pressure, standard model for primary side high pressure: TORR-2300

Features

The TORR series has gained high trust due to its long track record and is synonymous with “semiconductor gas pressure regulators.”
Assembly is conducted in a class 1000 cleanroom with all 0.3μm standards.
A filter is built into the flow path of the primary chamber to reduce internal leakage.
Includes a helium leak test among the comprehensive shipment inspections.
Production of electrolytic polishing specifications is possible (surface roughness of gas-contacting metal parts Ra 0.25μm).
The TORR-2300 series is used as a medium-flow model for primary high-pressure, requiring more flow than the TORR-1300, in primary pressure reduction facilities for high vapor pressure liquefied gases.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L
Filter: SUS316
Pressure Gauge: SUS316L (Threaded Connection)
Joint or fitting: SUS316L (Welded connection)
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604
Pressure regulating handle: C3604

Performance
Inlet side maximum working pressure: 20MPa
Outlet side maximum working pressure: 1.0MPa
Maximum flow rate: 1,400L/min(nor)（P1=8MPa, P2=1.0MPa, N₂ GAS）
Operating temperature: -5～40℃
Weight: 1.8kg (4 ports)
Built-in filter filtration degree: 20μm
Diameter of inlet and outlet ports: 1/4″
External leak amount: 1.3×10^-9Pa・m3/sec below (Threaded Connection) & 1.3×10^-10Pa・m3/sec below (Welded connection)

Flow Characteristics Diagram

Appearance

Description

Designated Attention

※1 The “SH” series, which uses a high corrosion-resistant alloy of Ni-Cr-Mo alloy for the metal parts in contact with gas, cannot accommodate certain requirements. The Ni-Cr-Mo alloy is equivalent to the American Haynes company’s “Hastelloy C-22.”
※2 In cases without a primary side pressure gauge, the symbol will be B5.

Operating Pressure	Symbol
～15MPa	B5
～20MPa	C5

※3 In cases without a secondary side pressure gauge, the symbol will vary depending on the pressure used.

Operating Pressure	Symbol
～0.2MPa	03
～0.4MPa	06
～0.6MPa	10
～1.0MPa	15

※ 4 Only fitting type S (Swagelok) can be selected.
※5 For other shapes, different symbols will be used.
※6 When using italic fittings, the structure will fundamentally be a welded connection. For other types of fittings, the structure will fundamentally be a threaded connection.
※7 Only fitting types S (Swagelok) and F (Finelok) can be selected.
※8If W (weld connection) is chosen for structure ②, M6R and M6L cannot be selected. W2R, W2L, and BHE will be treated as special products.
※9 Even when using the “SH” series, the material of the metal parts in contact with the gas of the pressure gauge will be SUS316L. If you require a pressure gauge with Ni-Cr-Mo alloy contact gas metal parts, please contact us.