Nissan Tanaka
NISSAN TANAKA TORR-350 Pressure Regulator For Semiconductors
Manufacturer: Nissan Tanaka
Model: TORR-350
Low-pressure, high flow model for primary side low pressure: TORR-350
Features
- The TORR series has earned high trust due to its long track record and is synonymous with “semiconductor gas pressure regulators.”
- Technicians assemble every unit in a class 1000 clean room with a 0.3μm class rating.
- Technicians perform helium leak tests and comprehensive inspections on all units before shipment.
- We can produce specifications for electrolytic polishing as well (with connection gas metal surface roughness Ra0.25μm).
- The TORR-350 series serves as a high-capacity model for primary low-pressure applications, suitable for large flow supplies of liquefied gas and for use in large-diameter piping.
- Please install a filter in the piping as the unit does not incorporate one.
Basic Specifications
Use materials
Gas connection part
Main body: SUS316L
Diaphragm: Chloroprene rubber (Teflon cover on the gas contact surface)
Pressure Gauge: SUS316L
Joint or fitting: SUS316
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604
Pressure regulating handle: C3604
Performance
Inlet side maximum working pressure: 1.5MPa
Outlet side maximum working pressure: 0.6MPa
Maximum flow rate: 230m3 /h(nor)(P1=1.5MPa, P2=0.6MPa, N₂ GAS)
Operating temperature: -5~40℃
Weight: 10kg
Diameter of inlet and outlet ports: 1/2″
External leak amount: 1.3×10-6Pa・m3/sec below (Threaded connection)/ 1.3×10-7Pa・m3/sec below (Welding connection)
Flow Characteristics Diagram
Appearance
Description
We will custom make the TORR-350 series according to your desired specifications. Please provide us with the details below.
Use Gas | |
---|---|
Application | |
Inlet Pressure | MPa |
Inlet Pressure Gauge | MPa |
Outlet Pressure | MPa |
Outlet Pressure Gauge | MPa |
Flow Rate Used | m3 /h(nor)(When Outlet Pressure is MPa) |
Inlet Fitting | |
Outlet Fitting | |
Other Requests |
Production Example
Product Name | Primary Side Pressure Gauge | Secondary Side Pressure Gauge | Inlet Fitting | Outlet Fitting |
---|---|---|---|---|
TORR-350HA | None | 1.0MPa Compound Gauge | 20A Insert Sleeve | |
TORR-350HP | None | 0.6MPa Compound Gauge | JIS10k25A Flange (RF) | |
TORR-350JH | None | 1.0MPa Compound Gauge | JIS10k25A Flange (RF) |
⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.
Kouei is Distributor/Agent of Nissan Tanaka
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