NISSAN TANAKA TORR-350 Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: TORR-350

Low-pressure, high flow model for primary side low pressure: TORR-350

Features

  • The TORR series has earned high trust due to its long track record and is synonymous with “semiconductor gas pressure regulators.”
  • Technicians assemble every unit in a class 1000 clean room with a 0.3μm class rating.
  • Technicians perform helium leak tests and comprehensive inspections on all units before shipment.
  • We can produce specifications for electrolytic polishing as well (with connection gas metal surface roughness Ra0.25μm).
  • The TORR-350 series serves as a high-capacity model for primary low-pressure applications, suitable for large flow supplies of liquefied gas and for use in large-diameter piping.
  • Please install a filter in the piping as the unit does not incorporate one.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: Chloroprene rubber (Teflon cover on the gas contact surface)
Pressure Gauge: SUS316L
Joint or fitting: SUS316
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604
Pressure regulating handle: C3604

Performance
Inlet side maximum working pressure: 1.5MPa
Outlet side maximum working pressure: 0.6MPa
Maximum flow rate: 230m3 /h(nor)(P1=1.5MPa, P2=0.6MPa, N₂ GAS)
Operating temperature: -5~40℃
Weight: 10kg
Diameter of inlet and outlet ports: 1/2″
External leak amount: 1.3×10-6Pa・m3/sec below (Threaded connection)/ 1.3×10-7Pa・m3/sec below (Welding connection)

Flow Characteristics Diagram

Appearance

Description

We will custom make the TORR-350 series according to your desired specifications. Please provide us with the details below.

Use Gas
Application
Inlet PressureMPa
Inlet Pressure GaugeMPa
Outlet PressureMPa
Outlet Pressure GaugeMPa
Flow Rate Usedm3 /h(nor)(When Outlet Pressure is MPa)
Inlet Fitting
Outlet Fitting
Other Requests

Production Example

Product NamePrimary Side Pressure GaugeSecondary Side Pressure GaugeInlet FittingOutlet Fitting
TORR-350HANone1.0MPa Compound Gauge20A Insert Sleeve
TORR-350HPNone0.6MPa Compound GaugeJIS10k25A Flange (RF)
TORR-350JHNone1.0MPa Compound GaugeJIS10k25A Flange (RF)

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.


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