NISSAN TANAKA TORR-800 Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: TORR-800 (TORR-800G, TORR-800M)

Low-pressure, high flow model for primary side low pressure: TORR-800

Features

  • The TORR series, with its long track record, has earned high trust and is synonymous with “semiconductor gas pressure regulators.”
  • We assemble it in a class 1000 clean room, where we use all parts that are 0.3μm. We include helium leak tests and conduct shipment inspections on all items.
  • The largest size of pressure regulator in the TORR series is the TORR-800 series.
  • You can find the TORR-800G series, which operates like a normal pressure regulator using a regulating handle, and the TORR-800M series, which allows for a higher flow rate with a pilot-operated design.
  • For even higher flow rates, we offer the TORR-800F series beyond the TORR-800M series.
  • If you require a higher flow rate, please inquire.
  • Please note that it does not incorporate a filter, so you should install a filter in the piping.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: Chloroprene rubber (Teflon cover on the gas contact surface)
Pressure Gauge: SUS316L
Joint or fitting: SUS316
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604(800G model) / SUS316(800M model)
Pressure regulating handle: C3604(800G model) / ABS plastic, C3604(800M model)

Performance
Inlet side maximum working pressure: 1.0MPa
Outlet side maximum working pressure: 0.6MPa
Maximum flow rate: 800G:280m3 /h(nor)(P1=0.7MPa, P2=0.6MPa, N₂ GAS), 800M:500m3 /h(nor)(P1=0.9MPa, P2=0.6MPa, N₂ GAS)
Operating temperature: -5~40℃
Weight: 32kg (800G model)/ 38kg (800M model)
Diameter of inlet and outlet ports: due to a meeting
External leak amount: 1.3×10-4Pa・m3/sec below

Flow Characteristics Diagram

Appearance

Description

We will custom make the TORR-800 series according to your desired specifications. Please provide us with the details below.

Use Gas
Application
Inlet PressureMPa
Inlet Pressure GaugeMPa
Outlet PressureMPa
Outlet Pressure GaugeMPa
Flow Rate Usedm3 /h(nor)(When Outlet Pressure is MPa)
Inlet Fitting
Outlet Fitting
Other Requests

Production Example

Product NamePrimary Side Pressure GaugeSecondary Side Pressure GaugeInlet FittingOutlet Fitting
TORR-800GQ1.5MPa gauge1.0MPa gaugeJIS10k25A Flange (RF)
TORR-800MC1.5MPa gauge1.0MPa gaugeJIS10k40A Flange (RF)

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.


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