Nissan Tanaka
NISSAN TANAKA TORR-800 Pressure Regulator For Semiconductors
Manufacturer: Nissan Tanaka
Model: TORR-800 (TORR-800G, TORR-800M)
Low-pressure, high flow model for primary side low pressure: TORR-800
Features
- The TORR series, with its long track record, has earned high trust and is synonymous with “semiconductor gas pressure regulators.”
- We assemble it in a class 1000 clean room, where we use all parts that are 0.3μm. We include helium leak tests and conduct shipment inspections on all items.
- The largest size of pressure regulator in the TORR series is the TORR-800 series.
- You can find the TORR-800G series, which operates like a normal pressure regulator using a regulating handle, and the TORR-800M series, which allows for a higher flow rate with a pilot-operated design.
- For even higher flow rates, we offer the TORR-800F series beyond the TORR-800M series.
- If you require a higher flow rate, please inquire.
- Please note that it does not incorporate a filter, so you should install a filter in the piping.
Basic Specifications
Use materials
Gas connection part
Main body: SUS316L
Diaphragm: Chloroprene rubber (Teflon cover on the gas contact surface)
Pressure Gauge: SUS316L
Joint or fitting: SUS316
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604(800G model) / SUS316(800M model)
Pressure regulating handle: C3604(800G model) / ABS plastic, C3604(800M model)
Performance
Inlet side maximum working pressure: 1.0MPa
Outlet side maximum working pressure: 0.6MPa
Maximum flow rate: 800G:280m3 /h(nor)(P1=0.7MPa, P2=0.6MPa, N₂ GAS), 800M:500m3 /h(nor)(P1=0.9MPa, P2=0.6MPa, N₂ GAS)
Operating temperature: -5~40℃
Weight: 32kg (800G model)/ 38kg (800M model)
Diameter of inlet and outlet ports: due to a meeting
External leak amount: 1.3×10-4Pa・m3/sec below
Flow Characteristics Diagram
Appearance
Description
We will custom make the TORR-800 series according to your desired specifications. Please provide us with the details below.
Use Gas | |
---|---|
Application | |
Inlet Pressure | MPa |
Inlet Pressure Gauge | MPa |
Outlet Pressure | MPa |
Outlet Pressure Gauge | MPa |
Flow Rate Used | m3 /h(nor)(When Outlet Pressure is MPa) |
Inlet Fitting | |
Outlet Fitting | |
Other Requests |
Production Example
Product Name | Primary Side Pressure Gauge | Secondary Side Pressure Gauge | Inlet Fitting | Outlet Fitting |
---|---|---|---|---|
TORR-800GQ | 1.5MPa gauge | 1.0MPa gauge | JIS10k25A Flange (RF) | |
TORR-800MC | 1.5MPa gauge | 1.0MPa gauge | JIS10k40A Flange (RF) |
⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.
Kouei is Distributor/Agent of Nissan Tanaka
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