NISSAN TANAKA TORR-800 Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: TORR-800 (TORR-800G, TORR-800M)

Low-pressure, high flow model for primary side low pressure: TORR-800

Features

  • The TORR series, with its long track record, has earned high trust and is synonymous with “semiconductor gas pressure regulators.”
  • We assemble it in a class 1000 clean room, where we use all parts that are 0.3μm. We include helium leak tests and conduct shipment inspections on all items.
  • The largest size of pressure regulator in the TORR series is the TORR-800 series.
  • You can find the TORR-800G series, which operates like a normal pressure regulator using a regulating handle, and the TORR-800M series, which allows for a higher flow rate with a pilot-operated design.
  • For even higher flow rates, we offer the TORR-800F series beyond the TORR-800M series.
  • If you require a higher flow rate, please inquire.
  • Please note that it does not incorporate a filter, so you should install a filter in the piping.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: Chloroprene rubber (Teflon cover on the gas contact surface)
Pressure Gauge: SUS316L
Joint or fitting: SUS316
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604(800G model) / SUS316(800M model)
Pressure regulating handle: C3604(800G model) / ABS plastic, C3604(800M model)

Performance
Inlet side maximum working pressure: 1.0MPa
Outlet side maximum working pressure: 0.6MPa
Maximum flow rate: 800G:280m3 /h(nor)(P1=0.7MPa, P2=0.6MPa, N₂ GAS), 800M:500m3 /h(nor)(P1=0.9MPa, P2=0.6MPa, N₂ GAS)
Operating temperature: -5~40℃
Weight: 32kg (800G model)/ 38kg (800M model)
Diameter of inlet and outlet ports: due to a meeting
External leak amount: 1.3×10-4Pa・m3/sec below

Flow Characteristics Diagram

Appearance

Description

We will custom make the TORR-800 series according to your desired specifications. Please provide us with the details below.

Use Gas
Application
Inlet Pressure MPa
Inlet Pressure Gauge MPa
Outlet Pressure MPa
Outlet Pressure Gauge MPa
Flow Rate Used m3 /h(nor)(When Outlet Pressure is MPa)
Inlet Fitting
Outlet Fitting
Other Requests

Production Example

Product Name Primary Side Pressure Gauge Secondary Side Pressure Gauge Inlet Fitting Outlet Fitting
TORR-800GQ 1.5MPa gauge 1.0MPa gauge JIS10k25A Flange (RF)
TORR-800MC 1.5MPa gauge 1.0MPa gauge JIS10k40A Flange (RF)

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.


Kouei is Distributor/Agent of Nissan Tanaka
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