Japan, Nissan Tanaka, Optical Product
NISSAN TANAKA TORR, S-TORR High Purity Gas Regulator
Manufacturer: Nissan Tanaka
Models: TORR, S-TORR
A variety of models from high pressure to very low pressure and for semiconductor and LCD gases.
TORR Regulator
Models applying high-corrosion-resistance alloy, Ni-Cr-Mo alloy (Hastelloy) to primary metallic parts contacting with gas are available for use in corrosive gases.
S-TORR Regulator
This is a model for super high-purity gas piping use, securing gas purity retaining performance and safety to the utmost limit. Models for special uses are available, such as models for strong corrosive gas, negative pressure control, and tied diaphragm type.
TORR Low Pressure Regulator for Semi-Conductor Use
| Model | Inlet pressure gauge (MPa) |
Outlet pressure range (MPa) |
Flow rate [at N₂] | Weight (kg) |
|---|---|---|---|---|
| TORR-30 1/4″, 3/8″ Point of Use Pressure Regulator |
Nil (Max. 5) | 0.99MPa with -0.1~1.5Mpa gauge 0.6MPa with -0.1~1.0Mpa gauge 0.4MPa with -0.1~0.6Mpa gauge 0.2MPa with -0.1~0.3Mpa gauge |
300NL/min (P2=0.4) | 1.1 |
| TORR-50 1/2″ Point of Use Pressure Regulator |
Nil (Max. 3.5) | 800NL/min (P2=0.4) | 1.6 | |
| TORR-80 3/4″ Point of Use and Hi-Flow Pressure Regulator |
Nil (Max. 2) | 1MPa with -0.1~1.5Mpa gauge 0.6MPa with -0.1~1.0Mpa gauge 0.4MPa with -0.1~0.6Mpa gauge 0.2MPa with -0.1~0.3Mpa gauge |
1,400NL/min (P2=1.0) | 3 |
| TORR-150 3/4″, 1 Point of Use and Hi-Flow Pressure Regulator |
Nil (Max. 2) | 1,400NL/min (P2=1.0) | 3.7 | |
| TORR-350 Point of Use and Ultra Hi-Flow Pressure Regulator |
Nil (Max. 1.5) | 220Nm³/h (P2=1.0) | 10 | |
| TORR-800 Point of Use and Ultra Hi-Flow Pressure Regulator |
Nil (Max. 1) | 300Nm³/h (P2=1.0) | 32 |
| Model | Maximum inlet pressure | Outlet pressure range (MPa) |
Flow rates |
|---|---|---|---|
| S-TORRⅡ-02iF series IGS Pressure Regulator |
1.0MPa | 0.4 MPa specification | 40L/min (nor) |
| S-TORRⅢ-30 series 1/2″ Point of Use Pressure Regulator |
1.5MPa | 0.6MPa with -0.1~1.0Mpa gauge 0.4MPa with -0.1~0.6Mpa gauge 0.2MPa with -0.1~0.3Mpa gauge |
50~90L/min (nor) |
| S-TORRⅢ-50 series 3/8″, 1/2″ Point of Use Pressure Regulator |
1.5MPa | 300~400L/min (nor) |
TORR High Pressure Regulator for Semi-Conductor Use
| Model | Inlet pressure gauge (MPa) |
Outlet pressure range (MPa) |
Flow rate [at N₂] | Weight (kg) |
|---|---|---|---|---|
| TORR-1300 Standard model as Cylinder Cabinet Pressure Regulator |
25 (Max. 15) | 1MPa with -0.1~1.5Mpa gauge 0.6MPa with -0.1~1.0Mpa gauge 0.4MPa with -0.1~0.6Mpa gauge 0.2MPa with -0.1~0.3Mpa gauge |
250NL/min (P2=0.5) | 1.3 |
| TORR-2300 1/4″ & 3/8″ Cylinder Cabinet Pressure Regulator |
1,400NL/min (P2=0.5) | 1.8 | ||
| TORR-2500 Cylinder Cabinet and Hi-Flow Pressure Regulator |
90Nm³/h (P2=0.5a) | 4.9 | ||
| TORR-3300 Cylinder Cabinet and Ultra Hi-Flow Pressure Regulator |
120Nm³/h (P2=0.5) | 14 | ||
| TORR-2800 *Corrosion gas |
25 (Max. 15) | 1MPa with -0.1~1.5Mpa gauge 0.6MPa with -0.1~1.0Mpa gauge 0.4MPa with -0.1~0.6Mpa gauge 0.2MPa with -0.1~0.3Mpa gauge |
1,400NL/min (P2=0.5) | 6.7 |
| TORR-H *Hight pressure |
25 (Max. 15) 35 (Max. 15) |
12MPa with 0~20Mpa gauge 6MPa with 0~10Mpa gauge 3MPa with 0~5Mpa gauge |
800NL/min (P2=6.0) | 2 |
| Model | Maximum inlet pressure | Outlet pressure range (MPa) |
Flow rates |
|---|---|---|---|
| S-TORRⅡ-1300 series 1/4″ Cylinder Cabinet Pressure Regulator |
15.0MPa | 1.0MPa with -0.1~1.5Mpa gauge 0.6MPa with -0.1~1.0Mpa gauge 0.4MPa with -0.1~0.6Mpa gauge 0.2MPa with -0.1~0.3Mpa gauge |
40-80L/min (nor) |
| S-TORRⅡ-2330 series 1/4″ & 3/8″ Cylinder Cabinet Pressure Regulator |
15MPa | 100~400L/min (nor) |
For corrosive gases
| Model | Maximum inlet pressure | Outlet pressure range (MPa) |
Flow rates |
|---|---|---|---|
| ORR-2800SH seriesCorrosive gas and Hi-Flow Pressure Regulato | 15.0MPa | 0.6MPa with -0.1~1.0Mpa gauge 0.4MPa with -0.1~0.6Mpa gauge 0.2MPa with -0.1~0.3Mpa gauge |
220~1400L/min(nor) |
For vacuum pressure
| Model | Maximum inlet pressure | Outlet pressure range (MPa) |
Flow rates |
|---|---|---|---|
| S-TORRⅢ-A10 series 1/4″ point of use and Cylinder Cabinet Vacuum Pressure Regulator |
1.0MPa | 0.2MPa with -0.1~0.3MPa gauge | 4~15L/min(nor) |
For liquid gases
| Model | Maximum inlet pressure | Outlet pressure range (MPa) |
Flow rates |
|---|---|---|---|
| TORR-2800 series Liquid gases and Hi-Flow Regulator |
15.0MPa | 1.0MPa with -0.1~1.5Mpa gauge 0.6MPa with -0.1~1.0Mpa gauge 0.4MPa with -0.1~0.6Mpa gauge 0.2MPa with -0.1~0.3Mpa gauge |
220~1400L/min(nor) |
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