Osaka Vacuum
Osaka TG420M Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TG420M
Features
- Any orientation
- Compact size
- Energy-saving
- Quick starts and stops
- Maintenance call
- Vibration free
- Model coupling free
- Automatic calibration
- High throughput
- Rotational speed control
- Serial communication
- Safety standards certification for NRTL SEMI-S2 CE
Specifications
| Inlet flange | VG150 CF160 ISO-B160 | |
| Volume flow rate | N2 (L/s) | 400 |
| N2 (with protectivescreen) (L/s) | 370 | |
| H2 (L/s) | 300 | |
| Max. compression ratio | N2 | 1×108 |
| H2 | 4.5×103 | |
| Base pressure | VG・ISO-B/CF (Pa) | <1×10-6 <1×10-7 |
| VG・ISO-B/CF (Torr) | <7.5×10-9 <7.5×10-10 | |
| Max. throughput※1 | N2 (sccm) | 2000 |
| Startup time | (min) | 2~3 |
| Shutdown time | (min) | 4~5 |
| Max. backing pressure | (Pa / Torr) | 400 / 3 |
| Recommended backing vacuum pump | (L/min) | ≧160 |
| Position | Any orientation | |
| Weight (kg) VG･ISO-B/CF | 14 / 17 | |
| Controller | TC010MA | |
| Special specifications *Contact our sales representative for | -Chemical-use -Thermal insulation TG-MI -Ultra low vibration TG-ML | |
- *1: When using a backing vacuum pump of 320L/min.
- [Ambient temperature for use]
- The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
Dimensions
| Ⓐ | Ⓑ | Ⓒ | Ⓓ |
| VG150 | φ235 | 16 | 225 |
| CF160 | φ203 | 22 | 230 |
| ISO-B160 | φ225 | 16 | 230 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
