Osaka Vacuum
Osaka TG800F Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TG800F
Features
- Any orientation
- Compact size
- Energy-saving
- Quick start up
- Quick shut down with gas vent
- Durable structure for air inrush
- Serial communication
※RS232C Serial interface - Certificated safety standard NRTL / SEMI-S2 / CE
Specifications
| Model | TG800F | TG800F*A*-60 TG800F*W* | |
| Inlet flange | VG150/ISO-B160/CF160 | ||
| Volume flow rate | N2 (L/s) | 820 | |
| N2 (with protective screen) (L/s) | 750 | ||
| H2 (L/s) | 650 | ||
| Max. compression ratio | N2 | 1×108 | |
| H2 | 1×104 | ||
| Base pressure | (Pa/Torr) | <1×10-6/<7.5×10-9 | |
| Max. throughput※1※2 | (sccm) | 330 | 860 |
| Startup time※2 | (min) | 7-9 | 5.5-7 |
| Shutdown time※2 | (min) | 27-32 | 12-15 |
| Max. backing pressure | (Pa/Torr) | 330/2.5 | |
| Recommended backing vacuum pump | (L/min) | ≧250 | |
| Position | Any orientation | ||
| Weight | VG・ISO-R/CF(kg) | 27/26 | |
| Controller | TC1104 | TC1103※3 | |
- *1: When using a backing vacuum pump of 500L/min.
- *2: Differs according to the power supply model.(standard:TC1104)
- *3: The air cooling fan must be replaced if air-cooled.(TG800F***-60)
- [Ambient temperature for use]
- The ambient temperature range to ensure you reach ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
- [Corresponding gases]
- Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.
Dimensions
| A | B | C | D |
| VG150 | φ235 | 12 | 312.5 |
| CF160 | φ203 | 22 | 327.5 |
| ISO-B160 | φ225 | 12 | 312.5 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
