Osaka Vacuum
Osaka TGkine MI-B Series Energy Efficient Heated Type
Manufacturer: Osaka Vacuum, Ltd.
Model: TGkine MI-B Series
Specifications
| Model | TGkine2200MI-B | TGkine3300MI-B | TGkine3400MI-B | TGkine3800MI-B | TGkine4200MI-B |
|---|---|---|---|---|---|
| Inlet flange | ISO-B250 / VG250 | ISO-B320 / VG300 | VG350 | ISO-B320 / VG300 | VG350 |
| Outlet flange | KF40 / KF50 | KF40 / KF50 | KF40 / KF50 | KF40 / KF50 | KF40 / KF50 |
| N₂ flow (L/s) | 2200 | 3300 | 3300 | 3600 | 4200 |
| N₂ with protective screen (L/s) | 2100 | 3100 | 3100 | 3400 | 4000 |
| H₂ flow (L/s) | 1800 | 2700 | 2700 | 2700 | 2700 |
| Max. compression ratio — N₂ | >2×10⁸ | >1×10⁸ | >1×10⁸ | >2×10⁸ | >2×10⁸ |
| Max. compression ratio — H₂ | 3×10³ | 3×10³ | 3×10³ | 2×10³ | 2×10³ |
| Base pressure (Pa) | <2×10⁻⁷ | <2×10⁻⁷ | <2×10⁻⁷ | <5×10⁻⁷ | <5×10⁻⁷ |
| Base pressure (Torr) | <1.5×10⁻⁹ | <1.5×10⁻⁹ | <1.5×10⁻⁹ | <3.8×10⁻⁹ | <3.8×10⁻⁹ |
| Max. throughput — N₂ (sccm) | 5000 | 2500 | 2500 | 2800 | 2800 |
| Max. throughput — Ar (sccm) | 3000 | 1800 | 1800 | 1400 | 2100 |
| Startup time (min) | ≤10 | ≤11 | ≤11 | ≤12 | ≤12 |
| Shutdown time (min) | ≤10 | ≤13 | ≤13 | ≤14 | ≤14 |
| Max. backing pressure (Pa) | 100 | 110 | 110 | 160 | 160 |
| Max. backing pressure (Torr) | 0.75 | 0.82 | 0.82 | 1.20 | 1.20 |
| Recommended backing pump (L/min) | ≥2000 | ||||
| Weight (kg) | 65 | 74 / 73 | 76 | 89 / 87 | 84 |
※1: TGkine1700MI-B is also available upon request. ※2: When the pump is backed by a 5000 L/min backing pump.
