Osaka Vacuum
Osaka TGkine1700M-B / 2200M-B Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TGkine1700M-B / 2200M-B
Features
- Integrated controller and power supply
- Energy saving
- Compact
- IP54 Standard
- Multiple interface options
- Conformed to International Standards:
- CE / NRTL / SEMI-S2
Specifications
| Model | TGkine1700M-B | TGkine2200M-B | ||
|---|---|---|---|---|
| TGkine1704M-B | TGkine1705M-B | TGkine2204M-B | TGkine2205M-B | |
| Inlet flange | ISO-B200 | ISO-B250 | ||
| Outlet flange | KF40 / KF50 VG200 | KF40 / KF50 VG250 | ||
| Volume flow rate N₂ (L/s) | 1650 | 2200 | ||
| N₂ (with protective screen; L/s) | 1570 | 2100 | ||
| H₂ (L/s) | 1550 | 1800 | ||
| Max. compression ratio (N₂) | >2×10⁸ | >2×10⁸ | ||
| Max. compression ratio (H₂) | 3×10³ | 3×10³ | ||
| Max. throughput N₂ (sccm) | 4400 | 5000 | ||
| Ar (sccm) | 2600 | 2600 | ||
| Base pressure (Pa) | <2×10⁻⁷ | <2×10⁻⁷ | ||
| Base pressure (Torr) | <1.5×10⁻⁹ | <1.5×10⁻⁹ | ||
| Startup time (min) | ≤10 | ≤10 | ||
| Shutdown time (min) | ≤10 | ≤10 | ||
| Max. backing pressure (Pa) | 220 | 220 | ||
| Max. backing pressure (Torr) | 1.65 | 1.65 | ||
| Recommended backing pump (L/min) | ≥2000 | ≥2000 | ||
| Mounting orientation | Any | Any | ||
| Input voltage (V) | AC200–240V | AC200–240V | ||
| Input phase | Single | Single | ||
| Input frequency (Hz) | 50 / 60 | 50 / 60 | ||
| Input current (A) | Max. 5.3 | Max. 5.3 | ||
| Input power (kVA) | Max. 0.9 | Max. 0.9 | ||
| Weight (kg) | 65 | 62 | ||
Notes:
- Please contact us for the specific model name.
- Specifications may vary depending upon the model.
- 1Pa·L/s(25℃)=0.543sccm(0℃,1atm).
- When the pump is backed by a 5000 L/min backing pump.
- Pressure attained after 48 hours of bake-out.
- Max. foreline pressure in which the pump can continue to run without triggering the fail-safe acceleration–shutdown feature.
Dimensions
