Osaka Vacuum
Osaka TGkine3800M-B / 4200M-B Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TGkine3800M-B / 4200M-B
Features
- Integrated controller and power supply
- Energy saving
- Compact
- IP54 Standard
- Multiple interface options
- Conformed to International Standards: CE / NRTL / SEMI-S2
- Following features of the TG-M series
Specifications
| Model | TGkine3800M-B | TGkine4200M-B | ||
|---|---|---|---|---|
| TGkine3804M-B | TGkine3805M-B | TGkine4204M-B | TGkine4205M-B | |
| Inlet flange | ISO-B320 | |||
| Outlet flange | KF40 | KF50 | KF40 | KF50 |
| VG300 | VG350 | |||
| Volume flow rate N₂ (L/s) | 3600 | 4200 | ||
| N₂ (with protective screen; L/s) | 3400 | 4000 | ||
| H₂ (L/s) | 2700 | 2700 | ||
| Max. compression ratio (N₂) | >2×10⁸ | >2×10⁸ | ||
| Max. compression ratio (H₂) | 2×10³ | 2×10³ | ||
| Max. throughput N₂ (sccm) | 2800 | 2800 | ||
| Ar (sccm) | 1400 | 1400 | ||
| Base pressure (Pa) | <5×10⁻⁷ | <5×10⁻⁷ | ||
| (Torr) | <3.8×10⁻⁹ | <3.8×10⁻⁹ | ||
| Startup time (min) | ≤12 | ≤12 | ||
| Shutdown time (min) | ≤14 | ≤14 | ||
| Max. backing pressure (Pa) | 160 | 160 | ||
| (Torr) | 1.2 | 1.2 | ||
| Recommended backing pump (L/min) | ≥2000 | ≥2000 | ||
| Mounting orientation | Vertical only | Vertical only | ||
| Input voltage (V) | AC200–240V | AC200–240V | ||
| Input phase | Single | Single | ||
| Input frequency (Hz) | 50 / 60 | 50 / 60 | ||
| Input current (A) | Max. 5.9 | Max. 5.9 | ||
| Input power (kVA) | Max. 1.0 | Max. 1.0 | ||
| Weight (kg) | 80 | 78 | 75 | 75 |
Notes:
- Please contact us for the specific model name.
- Specifications may vary depending upon the model.
- 1Pa·L/s(25℃)=0.543sccm(0℃, 1atm).
- When the pump is backed by a 5000 L/min backing pump.
- Pressure attained after 48 hours of bake-out.
- Max. foreline pressure in which the pump can continue to run without triggering the fail-safe acceleration–shutdown feature.
Dimensions
