Osaka Vacuum
Osaka Ultra-High Vacuum Type TG-MU Series Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TG-MU Series
Features
- The TG-MU Series is designed to efficiently evacuate light gases from High Vacuum down to Ultra High Vacuum region by reducing the materials’ outgassing and improving the efficiency of the Hydrogen compression.
- Ultimate Vacuum can be realized 10-9 Pa order ( in the 10-11 Torr) region within a short bake-out period.
Specifications
| TG900MU CF160 | TG1300MU CF200 | |
|---|---|---|
| Flange | ||
| Inlet | CF160 | CF200 |
| Outlet | KF40 | KF40 |
| Volume flow rate | ||
| N₂ (L/s) | 900 | 1300 |
| N₂ (with protective screen) | 860 | 1230 |
| H₂ (L/s) | 1050 | 1200 |
| Max. compression ratio | ||
| N₂ | 1×106 | |
| H₂ | 6.0×104 | |
| Base pressure (Pa/Torr) | < 1×10-8 (< 7.5×10-11) | |
| Max. throughput *1 (N₂, sccm) | 3000 | |
| Startup time (min) | 4–5 | 4–5 |
| Shutdown time (min) | 4–5 | 4–5 |
| Max. backing pressure (Pa/Torr) | 500 (3.8) | |
| Recommend backing vacuum pump (L/min) | ≥ 250 | |
| Mass (kg) | 42 | |
| Turbo Controller | TC010MA |
*1 In case of the backing vacuum pump of 1000 L/min.
*2 Dimension is same as standard.
