Osaka Vacuum
Osaka Ultra Low Vibration TG-ML Series Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TG-ML Series
Features
- Less than 1nm(o-p) measured by Radial & Axial acceleration.
- Advanced vibration cancellation algorithm eliminates the unwanted vibration amplitude resulted from the constant acceleration of the fast speed rotor.
- Coupled with external dampers, Super Ultra Low at less than 0.1 nm(o-p) can be realized with the TG-ML Series.
Specifications
| Flange | Inlet | Outlet | |||
|---|---|---|---|---|---|
| TG390ML VG100 ISO-80 CF100 | TG420ML VG150 ISO-100 CF160 | TG900ML VG150 ISO-160 CF160 | TG1300ML VG200 ISO-200 CF200 | ||
| Volume flow rate | 340 | 400 | 900 | 1300 | KF25 / KF40 |
| N₂ (with protective screen) | 320 | 370 | 860 | 1230 | |
| H₂ | 290 | 300 | 1050 | 1200 | |
| Max. compression ratio | |||||
| N₂ | 4.5×10⁵ / 1×10⁶ / 1.5×10⁴ | ||||
| H₂ | 4.5×10³ / 1×10⁴ / 1.5×10³ | ||||
| Performance | |||||
| Base pressure VG・ISO-B・CF (Pa/Torr) | <1×10⁻⁴ / <1×10⁻⁷ / <7.5×10⁻⁸ | ||||
| Startup time (min) | 2–3 | 4–5 | |||
| Shutdown time (min) | 4–5 | 4–5 | |||
| Max. backing pressure (Pa/Torr) | 400 (3) | 500 (3.8) | |||
| Recommended backing vacuum pump (L/min) | ≥160 | ≥250 | |||
| Mass (kg) | 14 / 17 | 34 / 42 | |||
| Turbo Controller | TC010MA ※Please contact us about the specification | ||||
