SHINKO SEIKI CO.
Shinko Seiki POEM Cleaning Unit
Manufacturer: Shinko Seiki Co., Ltd.
Model: POEM
Features
- Despite its compact body, this unit can process large areas (at least 8 inch).
- This unit is effective for hydrophilic processing before mounting and for organic film/oxide film removal.
- This unit can also be used for resin substrate surface processing.
Specifications
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