SHINKO SEIKI CO.
Shinko Seiki SRV Series Batch Type Sputtering System
Manufacturer: Shinko Seiki Co., Ltd.
Model: SRV Series
Features
- This series comes in a proven product lineup that allows users to select the best hardware, software and processes for a wide range of applications from research and development of a single substrate to full-scale mass-production.
Specifications
| Model | SRV4310 | SRV6310 | SRV7310 |
|---|---|---|---|
| Type | Parallel plate type | Parallel plate type | Parallel plate type |
| Target | |||
| Cathode type | Planar magnetron | Planar magnetron | RMC |
| Size × Quantity | φ 100 mm × 3 | φ 150 mm × 3 | φ 200 mm × 3 |
| Sputtering direction | Up | Up | Up |
| Substrate loading capacity | φ 320 mm | φ 320 mm | φ 520 mm |
| Substrate table | |||
| Rotary mechanism | ○ | ○ | ○ |
| Substrate heating | Substrate table: 300℃ | Substrate table: 300℃ | Substrate table: 300℃ |
| Film thickness distribution | Within ±10% (φ210) | Within ±10% (φ300) | Within ±10% (φ420) |
| Vacuum pumping system | |||
| Ultimate vacuum pressure | 6.0 × 10−5 Pa or less | 6.0 × 10−5 Pa or less | 6.0 × 10−5 Pa or less |
| Pumping time | Up to 9.9 × 104 Pa Within 10 minutes | Up to 9.9 × 104 Pa Within 10 minutes | Up to 9.9 × 104 Pa Within 10 minutes |
| Main pump | Cryo pump | Cryo pump | Cryo pump |
| Operation mode | |||
| Pumping operation | Automatic | Automatic | Automatic |
| Sputtering operation | Semi-automatic (With timer) | Semi-automatic (With timer) | Semi-automatic (With timer) |
| Sputtering power supply | |||
| RF | 500W | 1kW | 3kW |
| DC | Option | Option | Option |
| Gas supply system | 2 lines | 2 lines | 2 lines |
