Manufacturer: Sinfonia Technology co., LTD, Ltd.
Model: 300mm Sorter Clean

Features

1. Highly Reliable and Proven SELOP Series
The system features the highly reliable, well-established SELOP series. Additionally, it supports optional N2 purge load ports.
2. Particle-Free Operation
The proprietary airflow design and stationary robot minimize particle contamination, ensuring a clean wafer handling environment.
3. High Throughput
The system delivers high throughput for efficient wafer handling operations.
4. Minimal Footprint
The compact design minimizes installation space while maintaining efficient operation.
5. SEMI Standard Software (GEM300 Support)
The system uses SEMI-compliant software and supports GEM300 communication standards.
6. Multiple Configuration Options
The system offers various port configurations, including 2×2, 3×3, and 4×4, to accommodate different operational requirements.

Options