Japan, Tokyo Keiso
Tokyo Keiso CLFC300 Series Flow Controller
Made in Japan
Manufacturer: Tokyo Keiso
Model: CLFC300
The CLFC300 series is flow controller which integrates all functions of an ultrasonic flowmeter, a control valve, and a circuit for flow computation and valve control. Its control function can quickly follow the target flow rate.
Thus, the CLFC300 is ideal for liquid control which is essential in semiconductor manufacturing for the constant supply of chemicals and flow control of DIW and slurry.
Features
- Improved flow measurement
Flow measurement is stabilized by faster calculation and improved bubble resistance.
- Excellent controllability
A quick step response is achieved by state-of-the-art signal processing technology. The CLFC300 tracks variations in the flow and returns it to the set point within 1.5 seconds.
- Two valves for wider applications
A needle valve is available for chemical liquids and DIW, and a pinch tube valve for slurry liquids. The STA-PURE style pcs tube is added to the lineup of pinch tubes. This tube has excellent durability and does not need to be replaced regularly.
- Lightweight and compact
An ultrasonic flowmeter, a control valve, and a circuit are all contained in a single case. In addition, the layout was revised to make the controller more compact: it is now 20% smaller and 35% lighter.
- Easy installation
No complicated piping or wiring is required: simply connect the fittings and multi-core cables to complete the installation.
- Eco-friendly
Power consumption is reduced by 35%. All parts are complied with the RoHS requirements.
- Corrosion-resistant
The CLFC uses highly-corrosion-resistant PFA and PTFE for wetted parts and ultra-durable PVDF for the case.
It is ideal for the semiconductor industry and other industries that use corrosive chemicals.
- EMC-compliant
The controller conforms to EN 61326-1: 2006.
Applications
- Constant feed of chemical liquids and DIW
The CLFC300 ensures accurate and stable feed control of chemical liquids and DIW, which was conventionally conducted by metering pumps and static head tanks.
- Control of concentration
When CLFC300 are installed both in chemical liquids and pure water lines, they help directly dilute chemicals with pure water while controlling the concentration accurately and stably.
- Constant feed of slurry
The CLFC300 on various slurry lines of CMP devices ensures stable and constant feed of slurry and saves valuable liquids.
Specifications
Measuring and control objects |
Liquids (No bubbles contained for stable measurement) | |
---|---|---|
Measuring range | Minimum: 5 to 50 mL/min Maximum: 200 to 2000 mL/min |
50 to 500 mL/min |
Maximum operating pressure |
0.4 MPa | |
Operating temperature range of fluid |
10 to 50°C Consult Tokyo Keiso for the service more than 50°C | |
Process connection | Size: 1/4 inch | |
Type: Super 300 pillar fitting | ||
Wetted parts | PFA, PTFE | |
Output accuracy | Additional error for analog output: ±0.2% F.S. | |
Analog input / output signal |
One for set point signals and one for flow output signals Set point/Flow out: 4 to 20 mA/4 to 20 mA Input impedance: 250 Ω, Output load resistance: up to 600 Ω |
|
Power supply | 24 V DC ±10% | |
Applicable standard and EMC compatibility |
RoHS EMC standard: EN61326-1: 2006 |
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