Japan, Tokyo Keiso
Tokyo Keiso HM5000 Thermal mass flowmeter/Controller
Made in Japan
Manufacturer: Tokyo Keiso
Model: HM5000
HM5000 is the thermal mass flowmeter for the measurement of gases. There are two types available: a) general-purpose type and b) high performance type. Depending on the application, either of these types can be selected. As for the flow range, it is from minimum 0 – 5mL/min(nor) to maximum 0 – 400L/min(nor).
Features
Flow rate measurement in wide range
Available for wide range from 0 to 5mL/min(nor) to 0 to 400 L/min (nor).
High accuracy
±1%F.S. (High performance type)
Miniaturization and improvement of reliability
The following functions possible to add optionally.
Slow start function (Normal close type)
Output signal: 1 to 5VDC
Applications
Utility gas supply lines in industries
Various instruments for analysis
Semiconductor gas supply lines
Gas constant flow control and mixture control
Embedded devices
Specifications
Type | General-purpose type HM5122B HM5123B |
High performance type HM5111B HM5112B HM5113B |
---|---|---|
Measuring object | Gases | |
Flow range | Min.0 – 5mL/min(nor) Max.0 – 400L/min(nor) |
|
Operating temperature | 5 – 45 °C | |
Max. operating pressure | 0.97 MPa | |
Accuracy | ±2%F.S. (HM5123B: ±4%F.S.) |
±1%F.S. (HM5113B: ±2%F.S.) |
Material | Flow path: SUS316 Seal: Fluor rubber |
|
Process connection | Standard: 1/4″, 3/8″, 1/2″ SW Option: 1/4″, 3/8″, 1/2″ VCR, VCO |
|
Power supply | Dedicated power supply unit or ±15VDC: 60mA
-15VDC: 350mA |
|
Output | DC0 – 5V |
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