Japan, Tokyo Keiso
Tokyo Keiso P-820 Purgemeter
Made in Japan
Manufacturer: Tokyo Keiso
Model: P-820
Just like the popular P-810 model, the P-820 is also widely used in semiconductor production. Models with reed switch type alarm contact are available.
Major Applications
Flow measurement in semiconductor production equipment
Specifications
| Measuring fluid | Gases Liquid (Equivalent to water: Density 1.0g/cm³, Viscosity 1.0mPa·s) |
|---|---|
| Measuring range | Air
P-821 : Min. 0.5 to 5 mL/min(nor) Max. 12 to 60 L/min(nor) P-823: Min. 5 to 50 mL/min(nor) Max. 6 to 60 L/min(nor) Water P-821 : Min. 5 to 50 mL/min Max. 0.4 to 2 L/min P-823: Min. 5 to 50 mL/min Max. 0.2 to 2 L/min
|
| Range ability | 10:1(10:2 for some models) |
| Indication accuracy | P-821: ±5% F.S. P-823: ±3 F.S. |
| Fluid pressure | Max. 0.8 MPa |
| Fluid temperature | Max. 120°C (Depends on the gasket material) |
| Material | Wetted parts: SCS14(Standard), SUS316(Electrolytically polished)
Tapered tube: Heat-resistant glass Gasket: Fluro rubber (Max. 120°C) Chloroprene rubber (Max. 80°C)
Mounting plate: SPCC or C2801P Cover: Acrylic |
| Process Connection | Rc: 1/4″(Standard), 1/8″ NPT: 1/4″, 1/8″ SW: 1/4″, 3/8″ VCR: 1/4″, 3/8″ |
| Mounting | Lock nut mount on the panel front (Standard) Bezel mounting |
| Mass | approx. 0.6kg (P-821) |
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