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Chiyoda Seiki EX-100-TD Excellent For Corrosive Gas, Inner Surface Special Coating (Primary pressure: 20.0 MPa or less/adjustment pressure 0.1 to 1.0 MPa, maximum flow rate: 50 ℓ, 150 ℓ/min・Air)

Made in Japan
Manufacturer: Chiyoda Seiki
Model: EX-100-TD

Features

The design adopts an integrated valve and diaphragm type (tie diaphragm).
The parts of the gas contacting are made from SUS316 and undergo special corrosion-resistant surface treatment.
Super-secret structure with He leakage (external leakage) of 1×10-9Pa-m3/sec or less.
Prevents gas leakage from external blowout in the event of diaphragm breakage.

EX-100-TD

Specifications

Model EX-20-TD EX-100-TD
Certified Product MR-EX-20-TD MR-EX-100-TD
Specification G1 G1
Suitable Use Gas Ultra-pure Toxic/corrosive Ultra-pure, toxic, corrosive
Body SUS316 SUS316
Material Diaphragm SUS316 SUS316
Second-rate Pressure For Below 20.0MPa
Adjustment Pressure 0.1~1.0MPa
Standard Flow 0~202/min (standard state) 0-100g/min (standard state)
Maximum Flow 502/min (standard state) 150g/min (standard state)
Maximum CV Value 0.05
Operating Temperature -10~+60°C
Dew Point Temperature Below -70°C
He External Value Below 1X10Pa•m/sec
Dary Pressure Gauge Con G1/4 G1/4
Entrance Pure VCR 1/4 welded structure also strong, mouth 1/4 welded structure
Export Mirror VCR 1/4 welded structure, Tianmen mouth 1/4 welded structure
Mouth none
Death none
Quality 1,2 kg 1,3 kg

 

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