Chiyoda Seiki EX-100-TD Excellent For Corrosive Gas, Inner Surface Special Coating (Primary pressure: 20.0 MPa or less/adjustment pressure 0.1 to 1.0 MPa, maximum flow rate: 50 ℓ, 150 ℓ/min・Air)

Chiyoda Seiki, Japan

Made in Japan
Manufacturer: Chiyoda Seiki
Model: EX-100-TD

Features

The design adopts an integrated valve and diaphragm type (tie diaphragm).
The parts of the gas contacting are made from SUS316 and undergo special corrosion-resistant surface treatment.
Super-secret structure with He leakage (external leakage) of 1×10-9Pa-m3/sec or less.
Prevents gas leakage from external blowout in the event of diaphragm breakage.

EX-100-TD

Specifications

Model	EX-20-TD	EX-100-TD
Certified Product	MR-EX-20-TD	MR-EX-100-TD
Specification	G1	G1
Suitable Use Gas	Ultra-pure Toxic/corrosive	Ultra-pure, toxic, corrosive
Body	SUS316	SUS316
Material Diaphragm	SUS316	SUS316
Second-rate Pressure For	Below 20.0MPa
Adjustment Pressure	0.1~1.0MPa
Standard Flow	0~202/min (standard state)	0-100g/min (standard state)
Maximum Flow	502/min (standard state)	150g/min (standard state)
Maximum CV Value	0.05
Operating Temperature	-10~+60°C
Dew Point Temperature	Below -70°C
He External Value	Below 1X10Pa•m/sec
Dary Pressure Gauge Con	G1/4	G1/4
Entrance Pure	VCR 1/4 welded structure also strong, mouth 1/4 welded structure
Export Mirror	VCR 1/4 welded structure, Tianmen mouth 1/4 welded structure
Mouth	none
Death	none
Quality	1,2 kg	1,3 kg

Chiyoda Seiki, Japan

Features

Specifications

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