Manufacturer: Nissan Tanaka
Model: S-TORR V 2300SH, 2300AH

Equipment for Corrosive Gas, Corrosive Gas Model

Features

• The S-TORR regulator is a pressure regulator developed based on the highly reliable TORR regulator for ultra-high purity gases in the semiconductor process gas line.
• It eliminates the threaded structure in the gas connection part and achieves very high moisture displacement characteristics and particle reduction through standard electrolytic polishing.
• It uses welding for the body and joint connections and employs a metal seal structure for the external seal of the diaphragm section, ensuring high external sealing performance and allowing confident use, especially with high-purity gases.
• A filter is incorporated into the flow path of the primary chamber to reduce internal leaks.
• We conduct shipping inspections on all units, including helium leak tests.
• The STⅤ2300SH series is designed for parts that are particularly susceptible to corrosive gases, known as critical parts, and the STⅤ2300AH series utilizes a highly corrosion-resistant Ni-Cr-Mo alloy for all gas-contacting metal parts of the regulator itself.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L (2300SH), Ni-Cr-Mo alloy （2300AH)
Diaphragm: Ni-Cr-Mo alloy
Filter: Ni-Cr-Mo alloy
Pressure Gauge: SUS316L
Joint or fitting: SUS316L (2300SH), Ni-Cr-Mo alloy （2300AH)
Other gas contact parts: SUS316L, SUS316, Fluororesin （2300SH)/ Ni-Cr-Mo alloy （2300AH)
Non-contact gas part
Cap: C3604
Pressure regulating handle: ABS plastic, C3604

Performance
Inlet side maximum working pressure: 15MPa
Outlet side maximum working pressure: 1.0MPa
Maximum flow rate: 10L/min(nor)(P1=0.6MPa, P2=0.1～0.4MPa, N₂ GAS）/ 35L/min(nor)(P1=4.5MPa、P2=0.1～0.4MPa, N₂ GAS）/ 400L/min(nor)(P1=10MPa、P2=1.0MPa, N₂ GAS）
Operating temperature: -5～40℃
Weight: 1.7kg (2 ports), 2.1kg (4 ports)
Built-in filter filtration degree: 10μm
Surface roughness of connected gas metal parts: Ra0.25μm (optional： Ra0.1μm）
Diameter of inlet and outlet ports: 1/4″
External leak amount: 1.3×10^-11Pa・m3/sec below

Flow Characteristics Diagram

Appearance

Description

Designated Attention

※1 If you don’t have a primary side pressure gauge, assign the following symbols for each usage pressure.

Operating Pressure	Symbol
～1.0MPa	15
～15MPa	B5

※2 If you don’t have a secondary side pressure gauge, assign the following symbols for each usage pressure.

Operating Pressure	Symbol
～0.2MPa	03
～0.4MPa	06
～0.6MPa	10
～1.0MPa	15

※3 If you are installing pressure gauges on both the primary and secondary sides, choose a larger range for the primary side pressure gauge (③) than the secondary side pressure gauge (⑤). ※4 For a 2-port model, please select ‘X’ for both ④ and ⑥. For a 3-port model, select ‘X’ for ④ only. ‘X’ means the product comes without a pressure gauge (the port is unprocessed). If you are using just fittings without a pressure gauge, protect the fitting part with a resin cap for ‘F’ or a metal plug for ‘B’.
※5 Use different symbols for other types of fittings.
※6 Use different symbols for other shapes.
※7 Choose the optimal resin for the gas contact part (nozzle) based on the type of gas used.
※8 This serves as an example of additional specifications. Use symbols or numbers for face-to-face dimensions or other special accommodations. Please inquire for more details.

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.

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