Osaka Vacuum
Osaka TG1100F Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TG1100F
Features
- Any orientation
- Compact size
- Energy-saving
- Quick start up
- Quick shut down with gas vent
- Durable structure for air inrush
- Serial communication
※RS232C Serial interface - Certificated safety standard NRTL / SEMI-S2 / CE
Specifications
| Model | TG1100F | TG1100F*A*-60 TG1100F*W* | |
| Inlet flange | VG200 ISO-B200 CF200 | ||
| Volume flow rate | N2 (L/s) | 1100 | |
| N2 (with protective screen) (L/s) | 1000 | ||
| H2 (L/s) | 720 | ||
| Max. compression ratio | N2 | 1×108 | |
| H2 | 1×104 | ||
| Base pressure | (Pa/Torr) | <1×10-6/<7.5×10-9 | |
| Max. throughput ※1※2 | (sccm) | 330 | 860 |
| Startup time※2 | (min) | 7-9 | 5.5-7 |
| Shutdown time ※2 | (min) | 27-32 | 12-15 |
| Max. backing pressure | (Pa/Torr) | 330/2.5 | |
| Recommended backing vacuum pump | (L/min) | ≧250 | |
| Position | Any orentation | ||
| Weight | VG・ISO-R/CF(kg) | 28/27 | |
| Controller | TC1104 | TC1103※3 | |
- *1: When using a backing vacuum pump of 500L/min.
*2: Differs according to the power supply model.(standard:TC1104)
*3: The air cooling fan must be replaced if air-cooled.(TG1100F***-60) - [Ambient temperature for use]
- The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
- [Corresponding gases]
- Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.
Dimensions
| A | B | C | D |
| VG200 | φ300 | 16 | 281 |
| CF200 | φ253 | 25 | 306 |
| ISO-B200 | φ285 | 16 | 281 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
