Osaka Vacuum
Osaka TG50F Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TG50F
Features
- Any orientation
- Compact size
- Energy-saving
- Quick start up
- Quick shut down with gas vent
- Durable structure for air inrush
- Serial communication
- ※RS232C Serial interface
Specifications
| Model | TG50F | |
| Inlet flange | VG65/ISO-R63/CF63 | |
| Volume flow rate | N2 (L/s) | 51 |
| N2 (with protective screen) (L/s) | 49 | |
| H2 (L/s) | 12 | |
| Max. compression ratio | N2 | 1.4×107 |
| H2 | 5×102 | |
| Base pressure | VG・ISO-R/CF (Pa) | <3×10-6 |
| VG・ISO-R/CF (Torr) | <2.3×10-8 | |
| Max. throughput※1 | N2 (sccm) | 80 |
| Startup time | (min) | 1-1.5 |
| Shutdown time | (min) | 1-1.5 |
| Max. backing pressure | (Pa/Torr) | 1330/10 |
| Recommended backing vacuum pump | (L/min) | ≧50 |
| Position | Any orientation | |
| Weight | VG･ISO-R/CF(kg) | 4.2/6 |
| Controller | TC64 | |
- *1 : When using a backing vacuum pump of 100L/min.
- [Ambient temperature for use]
- The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
- [Corresponding gases]
- Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.
Dimensions
 |  |  |  |
| VG65 | φ145 | 14 | 147 |
| CF63 | φ114 | 18 | 182 |
| ISO-R63 | φ95 | 12 | 168 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
