Japan, Tokyo Keiso
Tokyo Keiso P-810 Purgemeter
Made in Japan
Manufacturer: Tokyo Keiso
Model: P-810
The P-810 is ideal for measuring the flow rates of various gases in semiconductor production. High reliability is ensured by circumferential seals.
The P-810 has a solid track record in applications with various devices.
Electrolytically polished models with low leakage are also available.
Major Applications
Gas flow measurement in semiconductor production equipment, especially for low-leakage lines
Specifications
| Measuring fluid | Gases Liquid (Equivalent to water: Density 1.0g/cm³,Viscosity 1.0mPa·s) |
|---|---|
| Measuring range |
|
| Range ability | 10:1 |
| Indication accuracy | ±3% F.S. |
| Fluid pressure | Max. 0.8 MPa |
| Fluid temperature | Max. 120°C (Depends on the gasket material) |
| Material | Wetted parts: SCS14(Standard), SUS316 (Electrolytically polished)
Tapered tube: Heat-resistant glass Gasket: Fluoro rubber (Max. 120°C) Chloroprene rubber (Max. 80°C)
Mounting plate: SUS304 Cover: Transparent PVC |
| Process Connection | Rc: 1/4″(Standard), 1/8″ NPT: 1/4″, 1/8″ SW: 1/4″, 3/8″ VCR: 1/4″, 3/8″ |
| Mounting | Lock nut mount on the panel front (Standard) Bezel mounting |
| Mass | approx. 0.6kg |
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