NISSAN TANAKA TPS Pressure Switch For Semiconductor Use

Manufacturer: Nissan Tanaka
Models: TPS (TPS-E1, TPS-E2, TPS-E3, TPS-E4, TPS-E5)

Suitable for pressure alarm of electronics material gas line. A variety models for high precision and portable light weight and from high pressure and low pressure.

Features

Material : SUS316L and SUS316
Leakage : Guaranteed He-leak less than 1.3×10－10Pa・m3/sec by welded connections
Small size and light weight
Setting pressure is changeable
Option : EP for materials in contact with media

Application

Suitable for pressure alarm and pressure control of electronics material gases or analysis gases required high purity, ultra clean and low leakage.

Cord color

Cord color	Mode
Black	C (common terminal)
White	NO (normal open)
Red	NC (normal close)

Specification

Model	Setting pressure range		Using upper limit pressure (MPa)	Repeat accuracy MPa	Working deviation MPa	Other specification
Model	Upper limit (MPa)	Lower limit (MPa)	Using upper limit pressure (MPa)	Repeat accuracy MPa	Working deviation MPa	Other specification
TPS-E1	-0.076~ +0.034	-0.096~ +0.014	0.5	±0.006	around 0.02	1) Current capacity : 5A－125VAC 2) Life time : 100,000 times 3) Connection : 1/4″ UJR Female, 1/4″ UJR Male or others 4) Surrounding temperature : －15～65℃(60％RH) 5) EP products (Option) 6) Cord length : About 300mm
TPS-E2	0.04 ~ 0.25	0.02~0.23	2	±0.007	around 0.02
TPS-E3	0.24 ~ 1.2	0.12~1.08	3	±0.036	around 0.12
TPS-E4	0.8~4	0.4~3.6	5	±0.12	around 0.4
TPS-E5	1~5	0.5~4.5	16.5	±0.15	around 0.5

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