Osaka Vacuum
Osaka TG70F Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TG70F
Features
- Any orientation
- Compact size
- Energy-saving
- Quick start up
- Quick shutdown with gas vent
- Durable structure for air inrush
- High compression ratio
- Built-in controller type
- Certificated safety standard NRTL/SEMI-S2/CE (for TG70F-20)
Specifications
| Flange | TG70F | TG70F-20 |
|---|---|---|
| Inlet | ISO-R63, CF63 | |
| Outlet | KF16 | |
| Volume flow rate | ||
| N₂ (L/s) | 70 | 75 |
| N₂ (with protective screen; L/s) | 65 | 70 |
| H₂ (L/s) | 40 | 45 |
| Max. compression ratio | ||
| N₂ | 1×10⁸ | |
| H₂ | 1×10⁵ | |
| Base pressure | ||
| Pa | <5×10⁻⁷ | <1×10⁻⁷ |
| Torr | <3.8×10⁻⁹ | <7.5×10⁻¹⁰ |
| Max. throughput N₂ (sccm) | 10 (Free convection) | 20 (Forced air cooling) |
| Startup time (min) | 2–2.5 | |
| Max. backing pressure Pa (Torr) | 1200 (9) | |
| Recommended backing vacuum pump (L/min) | ≥25 | |
| Weight (kg) | 3 | 5 |
| Controller type | TC75 | TC76 |
| Input voltage | DC24V | AC100–230V (±10%) |
| Input power | 120W | 240VA |
- ※1: In case of the backing vacuum pump of 25 L/min.
※2: TC75 is a built-in controller, TC76 is rack controller.
- ● Ambient temperature for use
The ambient temperature range to assure reaching the ultimate pressure is 10 to 23 °C. The permissible ambient temperature range is 8 to 38 °C. - ● Corresponding gases
Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
